Semiconductor Manufacturing

Kanomax USA - Semiconductor Manufacturing

Semiconductor Manufacturing Solutions

Cleanroom Particle Monitoring and Airflow Testing Tools for Semiconductor Fabs

In the fast-paced world of semiconductor manufacturing, maintaining ultra-clean environments is essential to ensure product yield, process stability, and compliance with ISO Class standards. Kanomax USA delivers advanced solutions for semiconductor cleanroom monitoring, airflow testing, and particle measurement, tailored to meet the rigorous demands of modern fabs and cleanroom facilities.

Precision Instruments for Critical Environment Control

Kanomax’s semiconductor solutions are trusted by fabs, tool manufacturers, and contamination control specialists to maintain cleanroom integrity, reduce downtime, and detect contamination risks before they escalate.

Our solutions include:

  • Airflow Testing Tools: Ensure consistent laminar airflow and ventilation performance with Kanomax’s high-precision air velocity meters, thermal anemometers, and micromanometers.
  • Particle Counters for Fabs: Monitor airborne particles in real time with portable particle counters and remote particle sensors, critical for identifying contamination sources and maintaining ISO Class 1–6 compliance.
  • Portable Clean Environments: Deploy clean booths and clean benches to create temporary ISO-class clean zones for equipment installation, repairs, or on-the-fly process control—all without disrupting surrounding operations.
  • Environmental Monitoring Systems: Track temperature, humidity, pressure differentials, and airflow patterns to ensure every parameter stays within optimal ranges for sensitive semiconductor processes.

Built for Semiconductor Industry Demands

Kanomax combines innovative Japanese engineering with decades of expertise in cleanroom monitoring and contamination control. Our tools are engineered for accuracy, reliability, and ease of use, helping cleanroom operators and technicians get precise readings quickly—without complicated setups or maintenance downtime.

Whether you’re qualifying airflow patterns in ISO 4 environments, monitoring real-time particle counts during photolithography, or setting up a portable cleanroom for equipment maintenance, Kanomax delivers solutions you can trust.

Semiconductor Manufacturing Instruments

Kanomax Handheld Particle Counters - Models 3888 & 3889

Handheld Particle Counters – Models 3888 and 3889

Kanomax’s innovative Handheld Particle Counters (Models 3888 & 3889) set the standard of instrumentation in cleanroom / operating room monitoring and verification, filter testing, IAQ investigation, data center cleaning and many more highly specialized and highly sensitive applications.

Learn More
Kanomax Portable Particle Counters - Models 3905 and 3910

Portable Particle Counters – Models 3910 and 3915

Kanomax Portable Particle Counters – Models 3905 and 3910 are the smallest 6-channel portable particle counters in the industry. They measure at 1.0 CFM (28.3 LPM) and 1.77 CFM (50 LPM), respectively.

Learn More
Kanomax 0.1 Micron Portable Particle Counter - Model 3950

0.1 Micron Portable Particle Counter – Model 3950

This revolutionary 0.1 µm 2-channel portable particle counter comes in one of the lightest form-factors available today; clocking in at only 7.5lbs (3.4kg). It is designed for high-end contamination control environments, such as semiconductor manufacturing facilities.

Learn More
Kanomax Remote Particle Sensor - Model 3719-A - 3/4 View

Remote Particle Sensors – Models 3718-A and 3719-A

Kanomax Remote Particle Sensors with analog output are designed to fit into your existing monitoring system, or they can be used as a stand-alone unit to monitor a critical area when connected to an alarm or controller. With two models available, these 2-channel remote particle sensors are capable of Modbus communication via RS485 interface.

Learn More

Aerosol Particle Monitor – AES-FPM Series

The Kanomax Aerosol Particle Monitor features an easy-to-read display, can connect to a network via ethernet, and offers simplified monitoring of particulates at multiple locations.

Learn More
Kanomax Climomaster Anemometer - 6501 Series

Climomaster Anemometer – 6501 Series

The Climomaster anemometer is a research grade handheld hot-wire anemometer that promises level 2% m.v. accuracy, making it the most accurate hot-wire airflow meter in the world.

Learn More
Kanomax TABmaster Airflow Capture Hood Balometer - Model 6720 - 2

TABmaster Airflow Capture Hood – Model 6720

The Kanomax TABmaster Airflow Capture Hood is an extremely lightweight and easy to handle balometer, and it’s perfect for your next HVAC test. It is equipped with professional-grade features that makes it both versatile and accurate.

Learn More
Airflow Transducer - Model 6333 Front

Airflow Transducer – Models 6333

Stationary hot-wire anemometer and compact design make it easy to build into other devices. 15 compatible probes available for simultaneous measurement of air velocity, temperature, and humidity. Both analog output and digital output available. 3 systems for analog output enables simultaneous measurement of air velocity, temperature, humidity.

Learn More
Kanomax Multi-Channel Anemometer - Model 1580 Front

Multi-Channel Anemometer – Model 1580

The world’s most accurate and responsive multichannel anemometer. Perfect for measuring airflow in semiconductor manufacturing. Measure up to 12 channels with the industry’s most accurate and smallest miniature probes. Features high heat resistance and temperature measurement. Multi-point measurement has never been easier.

Learn More
Kanomax Multi-Channel Anemometer - Model 1590, 1591, 1592 Front

Multi-Channel Anemometer PRO – Model 1590

With accuracy and responsiveness that encompasses the entire air velocity range, including the breeze speed range, this instrument provides the highest level of accuracy in the world. Multipoint measurement on up to 144 channels is realized with the industry’s smallest level miniature probe, high heat resistance, and temperature measurement.

Learn More
Table KOACH - Model T 500-F

Table KOACH – Model T 500-F

Koken’s Table KOACH is able to create a local environment of ISO Class 1 cleanliness in order to solve the carry-over contamination problem that is caused by airborne particulates in the laboratory.

Learn More
Stand KOACH C 645-F Mobile Clean Environment

Stand KOACH – Models C 645-F & C 900-F

Koken’s Stand KOACHs are able to create an even larger local ISO Class 1 clean environment than the Table KOACH.

Learn More