0.1 Micron Portable Particle Counter – Model 3950

The perfect 0.1 micron semiconductor manufacturing particle counter

Request Quote

This revolutionary 0.1-0.3 micron 2-channel semiconductor particle counter comes in one of the lightest form-factors available today; clocking in at only 7.5lbs (3.4kg). It is designed for high-end contamination control environments, such as semiconductor manufacturing facilities and cleanrooms, and can be used for standalone operation or integrated into an existing monitoring system to accommodate a vast array of applications.

Device operation is made easy with its built-in 4.3 inch LCD color touchscreen, ability to store up to 10,000 records, and USB data transfer capability.

More Information

Navigate the tab section below to see this product’s Features & Benefits, Specifications, Resources, and more.

  • 0.1 μm sensitivity
  • 2-channels (0.1-0.3 μm)
  • 0.1CFM (2.83L/min) - Compliant with JIS
  • B9921 and ISO21501-4
  • 4.3 inch color touchscreen display
  • Interface: RS-485, Ethernet, USB
  • Up to ISO Class 1 Cleanroom
  • Monitoring
  • Semiconductor Manufacturing
  • Surgical Room Monitoring

Main Unit Specifications
Particle MeasurementModel3950
Measuring MethodLight scattering
Flow Rate0.1 CFM (2.83 LPM); Accuracy: ±5% (compliant with JIS B9921 and ISO21501-4)
Sampling TimeFrom 6 seconds to 99 minutes and 59 seconds for 1 measurement cycle
Interval TimeFrom 6 seconds to 99 minutes 59 seconds
(interval between the start and the next start of the repeat measurements)
Sampling TimeFrom 1 to 999 cycles or continuous measurements
Location Classification99 locations
Measuring ModeRepeat, Single, Continuous, Calculation
Measurement Display TimeFrom 1 to 10 seconds
Measurement Display TypesCumulative Σ, Differential Δ, and Bar graph
Maximum Measurable Concentration10,000,000 particles/m3 at 10% coincidence loss
(compliant with JIS B9921 and ISO21501-4)
Counting Efficiency50±20% (for 0.1μm PSL particle) ; 100±10% (for 0.2μm PSL particles)
(compliant with JIS B9921 and ISO21501-4)
False Count≤1 particle/35 minutes
Size Resolution≤15% for PSL particles near 0.3μm (compliant with JIS B9921 and ISO21501-4)
VacuumInternal pump
Display4.3 inch color LCD, resistive touch panel
CommunicationStandardUSB (Host: for printer and USB flash memory, Device: for PC)
Ethernet, MODBUS (RS485
Recording MediaDataloggingUp to 10,000 records
Data FormatCSV format
LanguageEnglish, Japanese
PowerExternal supplyAC adaptor Input 100 to 240 V
Main BodyFrom 15 to 35 °C, from 0 to 85%RH (with no condensation)
Dimensions6"W x 2.5"H x 9"D (W150 X H163 X D228 mm)
Weight7.5lbs (3.4kg)

User Manual


Data Sheet


Software Manual


Our sales representatives are here to help you find the right instrument for your application. Fast.

Request a quote today to find the product you need with expert assistance.

Request a Quote Today