This revolutionary 0.1-0.3 micron 2-channel semiconductor particle counter comes in one of the lightest form-factors available today; clocking in at only 7.5lbs (3.4kg). It is designed for high-end contamination control environments, such as semiconductor manufacturing facilities and cleanrooms, and can be used for standalone operation or integrated into an existing monitoring system to accommodate a vast array of applications.
Device operation is made easy with its built-in 4.3 inch LCD color touchscreen, ability to store up to 10,000 records, and USB data transfer capability.
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- 0.1 μm sensitivity
- 2-channels (0.1-0.3 μm)
- 0.1CFM (2.83L/min) - Compliant with JIS
- B9921 and ISO21501-4
- 4.3 inch color touchscreen display
- Interface: RS-485, Ethernet, USB
- Up to ISO Class 1 Cleanroom
- Monitoring
- Semiconductor Manufacturing
- Surgical Room Monitoring
| Main Unit Specifications | ||
|---|---|---|
| Particle Measurement | Model | 3950 |
| Measuring Method | Light scattering | |
| Flow Rate | 0.1 CFM (2.83 LPM); Accuracy: ±5% (compliant with JIS B9921 and ISO21501-4) | |
| Sampling Time | From 6 seconds to 99 minutes and 59 seconds for 1 measurement cycle | |
| Interval Time | From 6 seconds to 99 minutes 59 seconds (interval between the start and the next start of the repeat measurements) |
|
| Sampling Time | From 1 to 999 cycles or continuous measurements | |
| Location Classification | 99 locations | |
| Measuring Mode | Repeat, Single, Continuous, Calculation | |
| Measurement Display Time | From 1 to 10 seconds | |
| Measurement Display Types | Cumulative Σ, Differential Δ, and Bar graph | |
| Maximum Measurable Concentration | 10,000,000 particles/m3 at 10% coincidence loss (compliant with JIS B9921 and ISO21501-4) |
|
| Counting Efficiency | 50±20% (for 0.1μm PSL particle) ; 100±10% (for 0.2μm PSL particles) (compliant with JIS B9921 and ISO21501-4) |
|
| False Count | ≤1 particle/35 minutes | |
| Size Resolution | ≤15% for PSL particles near 0.3μm (compliant with JIS B9921 and ISO21501-4) | |
| Vacuum | Internal pump | |
| Display | 4.3 inch color LCD, resistive touch panel | |
| Communication | Standard | USB (Host: for printer and USB flash memory, Device: for PC） Ethernet, MODBUS (RS485 |
| Recording Media | Datalogging | Up to 10,000 records |
| Data Format | CSV format | |
| Language | English, Japanese | |
| Power | External supply | AC adaptor Input 100 to 240 V |
| Operating Environment | Main Body | From 15 to 35 °C, from 0 to 85%RH (with no condensation) |
| Dimensions | 6"W x 2.5"H x 9"D (W150 X H163 X D228 mm) | |
| Weight | 7.5lbs (3.4kg) | |
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